Abstract
Abstract An amorphous Au-Si alloy with composition Au-28·5 at. % Si (Au5Si2) has been formed by inplanting energetic Xe, Ar or Ne ions through a thin layer of Au deposited on a Si substrate. The ion-induced amorphous Au-Si alloy is uniform in composition and in thickness as indicated by 4He+ backscattering measurement. The Au-Si alloys so obtained were studied by resistivity measurements and by transmission electron microscopy and diffraction. Two distinct stages of phase transformation are observed as revealed by a sudden change of resistivity with increasing annealing temperature. In the first stage, a transformation from amorphous to a metastable crystalline Au5Si2 phase occurs in a narrow temperature range around 100°C. The second stage, which appears broader near 180°C, involves the transformation to the equilibrium two-phase state of Au and Si. The kinetics of the amorphous to metastable crystalline transformation has been determined by isothermal annealing over the temperature interval 85-101°C. An...
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