Metamaterial fishnet structures and small (70 nm) split ring resonators formed by nanoimprint lithography

Abstract

We report on the fabrication and optical characterisation of fishnet structures of various dimensions on a polymer layer with metal-dielectric-metal compressed rectangular pillars. The metamaterial structures are fabricated using nanoimprint lithography, allowing large areas to be patterned quickly with good reproducibility through multiple use of a nanoimprint stamp. We also report on the use of NIL to produce 70 nm wide single spilt ring resonators on silicon substrates pushing the magnetic resonance to 830 nm.