Abstract

This paper reviews the growth and some characteristics of group III-nitrides by metalorganic vapour phase epitaxy with a particular focus on GaInN layers and heterostructures. We discuss the problems encountered with the low In incorporation efficiency. This can be partly compensated by larger growth rates and higher nitrogen-hydrogen ratios in the carrier gas. However, the grown layers with larger In content show evidence of composition fluctuations and even surface roughening due to problems probably arising from the large lattice mismatch to GaN and from the miscibility gap predicted for essentially the whole composition range. This influences strongly the spectroscopic properties. Consequences on the functionality of optoelectronic devices are also shortly discussed.

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