Abstract

Detection and control of air quality are major concerns in recent years for environmental monitoring and healthcare. In this work, we developed an integrated sensor architecture comprised of nanostructured composite sensing layers and a flexible heating substrate for portable and real-time detection of nitrogen dioxide (NO2). As sensing layers, PdO-infiltrated Co3O4 hollow nanocubes (PdO-Co3O4 HNCs) were prepared by calcination of Pd-embedded Co-based metal-organic framework polyhedron particles. Single-walled carbon nanotubes (SWCNTs) were functionalized with PdO-Co3O4 HNCs to control conductivity of sensing layers. As a flexible heating substrate, the Ni mesh electrode covered with a 40 nm thick Au layer (i.e., Ni(core)/Au(shell) mesh) was embedded in a colorless polyimide (cPI) film. As a result, SWCNT-functionalized PdO-Co3O4 HNCs sensor exhibited improved NO2 detection property at 100 °C, with high sensitivity (S) of 44.11% at 20 ppm and a low detection limit of 1 ppm. The accelerated reaction and recovery kinetics toward NO2 of SWCNT-functionalized PdO-Co3O4 HNCs were achieved by generating heat on the Ni(core)/Au(shell) mesh-embedded cPI substrate. The SWCNT-functionalized porous metal oxide sensing layers integrated on the mechanically stable Ni(core)/Au(shell) mesh heating substrate can be envisioned as an essential sensing platform for realization of low-temperature operation wearable chemical sensor.

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