Abstract
AlGaAs double heterostructure laser diodes with grown optical window structure facets have been fabricated by single-step metalorganic chemical vapor deposition (MOCVD) growth on grooved substrates for the first time. We report a new technique which permits the simultaneous formation of optical feedback mirrors and a submicron-thick window region. [01 1 ]-oriented dovetail grooves on a GaAs(100) substrate were prepared by wet etching. The growth was carried out by atmospheric-pressure MOCVD. The resulting broad area laser diode with a 0.3 μm thick window region has a threshold current and slope efficiency similar to that of a laser diode with conventional cleaved facets. The light output power versus current characteristics were improved.
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