Abstract
Fundamental experiments taking notice of the solid-solubility of the implanted ions in a substrate were conducted with the aim of elucidating the mechanism causing a change in hardness distribution, because the solid-solubility is considered to have a strong influence on the behavior of the implanted ions within the substrate. Ion implantation of carbon (C) ions itno substrates of two different materials, i.e., nickel (Ni) and copper (Cu), was attempted with an acceleration energy of 3 MeV and with dose levels between 1 × 10 16 ions/cm 2 and 5 × 10 17 ions/cm 2. C ions were used because the solid-solubility of C in Cu is greatly different from that in Ni. In Ni, which has a limited terminal solid-solubility for C, a Gaussian-like hardness distribution was obtained, whereas in Cu, which has no solubility for C, a uniform hardness distribution was achieved over the depth direction. Those results suggest that the solid-solubility as a metallurgical parameter has a strong influence on the hardness distribution which results from ion implantation.
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