Abstract
ABSTRACT Synthesis of ferroelectric (Pb1−xCax)TiO3 (PCT) thin films over Pt/Ti/SiO2/Si substrates by metallo-organic decomposition (MOD) technique using a new chemical precursor route is described. The Ca composition dependent changes in the structural, dielectric and ferroelectric properties of the PCT films have been investigated. Typical tetragonal structure of the PCT films is evidenced with Ca ≤ 40% and at higher Ca concentration ∼50% a transformation to a pseudocubic structure is observed. Dependence of the ferroelectric properties on the Ca substitution is related to the combined effect of reduction in internal stress in the films, decrease in the grain size and dielectric anisotropy.
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