Abstract
A water cooled magnetron sputtering system has been successfully applied to the deposition of silver onto thin thermally fragile Mylar sheets. The sheets were stencil masked to provide a pattern of row and column conductors in a 64-cell membrane switch array which was intended for use in a microcomputer based aid for the handicapped. The specification for such a microcomputer scanned keyboard matrix is outlined and the design details given for a back-illuminated array of cross point switches. Test results indicate that the technique is potentially suitable for the production of low-profile, high reliability keyboards and other low resistivity flexible conductor applications.
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