Metallic Glass-Based Dual-Mode Sensor for Soft Electronics

Abstract

The metallic glass with an amorphous structure can be a new approach for the electrode in flexible and stretchable electronics. In comparison with general crystalline metal, metallic glass has interesting mechanical and physical properties such as low Young's modulus (108GPa), hardness(5.91GPa), and high durability under mechanical stress. Also, we were able to enhance the mechanical property of metallic glass by adopting a multi-layer structure which is further investigated from our previous research. Using this metallic glass, we fabricated electronic skin that can mimic the pressure and temperature sensing ability of human skin. The pressure response of the sensor was studied with a wide range (from 100Pa to 5kPa), fast response (25ms), and good linearity in temperature response (0.22%/°C) with optimized NiTi/FeZr multi-layer structure. In this report, we present the feasibility of metallic glass as a stretchable electrode in soft electronics that also may find industrial applications in the health-care system, flexible sensors, and electronic skin for humanoid.