Abstract

AbstractA unique nanowire growth was accomplished at 575 oC by the metal-induced growth (MIG). That is a spontaneous reaction between metal and Si. The deposited metal worked as a catalyst layer to grow nanowire in the solid-state. Various metals (Ni, Co, and Pd) were used in MIG nanowire fabrication and Ni-induced case was successful in demonstrating that metal species should be a dominant mover in nanowire growth. Transmission electron microscopy investigation was performed to observe the nanowire growth direction. The Ni to Si composition was studied by energy dispersive spectroscopy showing the Ni diffusion inside the nanowire as well as the Ni silicide layer. The practical application MIG nanowire was proven by fabricating nanoscale contacts.

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