Abstract
Sulfur dioxide (SO2) is one of the most toxic and hazardous gas having adverse effect on the health and environment. In the present report, an attempt is made to fabricate SO2 gas sensor using SnO2 thin film integrated with various metal oxide catalyst (PdO, CuO, NiO, MgO, V2O5) in the form of 10nm thin dotted clusters of 600μm diameter. The structural, optical and surface morphological properties of the SnO2 thin film have been studied. The bare SnO2 thin film sensor exhibits the sensing response of about 1.3 at 220°C whereas, NiO/SnO2 sensor shows the enhanced sensing response (∼56) towards 500ppm SO2 gas at a relatively low operating temperature (180°C). A correlation has been established between the observed sensing response and the properties of the sensing film. Selectivity of the NiO/SnO2 sensor was tested towards different interfering gases and found to be highly selective for SO2 gas.
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