Abstract

Thin films of amorphous vanadium metal were deposited on a glass substrate using the electron beam evaporator, these thin films were thenexposed to a focused1064nm wavelengthnanosecond laser pulses. The laser fluence was selected such that it was below the ablation threshold of the films, x-ray diffraction measurementrevealedthe formation of an oxide phase of vanadium after the laser exposure.The time of flight-secondary ion mass spectrometry data analysisshowed a uniform elemental distribution of the elements on the films, whereas the Rutherford backscattering spectrometry results showed that the concentration of oxygen as a function of the laser fluence wasincreasing, hinting to the incorporation of the oxygen atoms in the films as the laser fluenceincreases. UV-Vis-NIRpercentage reflectance measurements showed small evolution in the visible part of the spectrum due to laserexposure.

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