Abstract

A method is described to measure the thickness Δ x of a thin reaction layer AB v betwen a substrate A and a thin overlayer B by X-ray fluorescence. Formulae are given for the calculation of Δ x from X-ray intensity measurements; Δ x can also be determined by means of calibration procedures. Calculation of Δ x from X-ray fluorescence measurements and determination of Δ x by weighing after dissolving the overlayer B give results that agree well, provided the absorption of the fluorescence beam is strong enough and the thickness of the overlayer B, before the reaction, is several thousand Ångströms.

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