Abstract
Abstract Meso-scale electromagnetically actuated reciprocating diaphragm pumps were fabricated with low-temperature co-fired ceramic (LTCC) tapes and Kapton polyimide film. One design of the pump consisted of a chamber machined in LTCC substrate layers. The chamber was covered on one side with a Kapton diaphragm on which copper coils were shaped. The diaphragm was electromagnetically actuated in the presence of a permanent magnet. Passive Kapton flap valves were used to direct fluid flow into and out of the chamber. In the second pump design, the chamber was covered on both sides with Kapton diaphragms. Coils were formed on both diaphragms and current was transmitted through these coils in opposite directions and in the presence of a permanent magnet. Data for flow rate as a function of actuation frequency is presented for the first pump design. Although the pump was not optimized, flow rates on the order of a few mL per minute were recorded.
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