Abstract
Silica layers with controllable porosity and pore size were prepared via a templating approach. The structure of these mesoporous films was examined by porosimetry via ellipsometry and transmission electron microscopy. A design of experiment (DOE) method was used to gather information about the influence of the processing parameters on the final film structure. A model was developed, allowing a precise control of the pore diameters and porosity of the silica coating.
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