Mesh adaption and flux discretizations for dopant diffusion modeling

Chih-Chuan Lin Chih-Chuan Lin,M.E Law

doi:10.1109/nupad.1994.343469

Mesh adaption and flux discretizations for dopant diffusion modeling

Chih-Chuan Lin Chih-Chuan Lin, M.E Law

https://doi.org/10.1109/nupad.1994.343469

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Publication Date: Jun 5, 1994

Citations: 2

Affiliation: University of Florida

#Discretization Error Control #Automatic Mesh Generation + Show 8 more

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Abstract

Mesh generation for process simulation is a difficult task, complicated by both the moving boundaries and the time dependence of the solutions. For both computational and ease of use reasons, automatic mesh generation and discretization error control is desirable. This paper describes an approach based on local error estimates to refine the mesh. This paper extends our previous work to two-dimensional problems.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>

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