MEMS电容式三维微触觉测头设计及校准

Abstract

It is difficult to measure large size components in higher precision and a 3D mode in the micro-nano geometrical measurement.Therefore,a high resolution,small sized capacitance sensor was fabricated based on non-silicon Micro-electronic-mechanical system(MEMS)technology.By designing the packaging and weak-capacitance acquisition system of the sensor,a capacitance-based micro tactile probe was developed to measure the 3D dimensions in micro/nano scale.Then,a 3D micro displacement platform was designed to test and calibrate the probe.The macro-micro combination drive modewas used to design the stage and its moving range is 25mm×25mm×10mm and the uniaxial resolution in 12μm range is 1nm.Finally,the range,linearity,hysteresis and resolution of the probe were tested.Results show that the axial range is 4.5μm,the lateral range is greater than 5μm,the axial resolution and the lateral resolution of the probe are less than 10nm and 25nm,respectively.The experiments show that the probe has a good linearity and its advantages are simple structure,high resolution,small volume and low costs.The probe developed can be integrated to the nano measuring and positioning machine(NMM)to complete required measurement tasks in large ranges and sub-micrometer or nanometer level accuracy.