MEMS Thermal Flow Sensor With Smart Electronic Interface Circuit

Abstract

A smart system for flow measurement is presented, consisting of a micromachined thermal flow sensor combined with a smart front-end electronic interface. The flow sensor is based on a novel thermal transduction method, which combines the hot-film and calorimetric sensing principles. The sensor consists of four germanium thermistors embedded in a thin membrane and connected to form a Wheatstone bridge supplied with a constant DC current. In this configuration, both the bridge unbalance voltage and the voltage at the bridge supply terminals are functions of the flow offering high initial sensitivity, i.e., near zero flow and wide measurement range, respectively. The front-end interface is based on a CMOS relaxation oscillator circuit where the frequency and the duty cycle of a rectangular-wave output signal are related to the bridge unbalance voltage and the voltage at the bridge supply terminals, respectively. Furthermore, the amplitude of the output signal is a linear function of the operating temperature. In this way, a single output signal advantageously carries two pieces of information related to the flow velocity and provides an additional measurement of the sensor operating temperature, which enables the correction of the temperature dependence of the sensor readouts. The system has been experimentally characterized for the measurement of nitrogen gas flow velocity at different sensor temperatures. The initial sensitivities at room temperature result 13.7 kHz/(m/s) and 23.5%/(m/s), in agreement with FEM simulations, for frequency and duty cycle readouts, respectively, with an equivalent velocity resolution of about 0.5 and 1.3 cm/s.