Abstract
The Micro-Electro-Mechanical Systems (MEMS) technology is the cutting-edge technology platform for innovation during the 21st century, to understand and master the basic situation with their own research projects and to carry out the related application is the core of the modern scientific and technological developing. Falls far short of the MEMS platform and applications with foreign countries, to build the platform and apply research is the fundamental responsibility of our institutions of higher learning and research institutes. This article reviews the MEMS situation domestic and abroad and studies the dynamic MEMS processing technology and Bio-Sensor, the problems faced by China's MEMS industry as well as prospects for the development prospects.
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