MEMS quadrupole mass spectrometer

Abstract

This paper presents the development results of MEMS-based miniature Quadrupole Mass Spectrometer (mQMS). The core components required for the analysis – the ion source, mass analyzer, and ion detector – are fabricated in MEMS technology using monocrystalline silicone and borosilicate glass. These components are housed within a 3D-printed package, ensuring mechanical stability and proper alignment of elements. The utilized MEMS Quadrupole mass analyzer, measuring 70 mm in length with internal radius of 500 µm, provides an analysis resolution of 50 and a mass range between 1 and 200 u when operating at 6 MHz. Our work demonstrates that devices miniaturized using MEMS techniques, along with novel 3D printing fabrication methods, present an emerging coupling, enabling the opportunity to develop portable yet powerful instrumentation for a range of applications. This opens new possibilities for on-site, real-time analysis across various fields.