Abstract
The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In this paper, microelectromechanical system (MEMS)-based pressure sensor contains nanostructured electrode consisting of carbon nanotube (CNT) array. CNTs are directly grown on such electrode by plasma-enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use a simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of CNTs field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of CNTs are measured by newly developed system enabling us precise measurement of expecting properties, such as dependence on diaphragm (upper electrode) distance, applied voltage, and stability of the sensor. Measured values are compared with a numerical modeling of the membrane system in Coventor Ware software by finite-element method. We also suggest encapsulating the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.
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