Abstract
A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS). The integrated sensor has a high sensitivity due to the MEMS technique and the spherical end of the fiber. The results show that the sensor achieves a pressure sensitivity of approximately 0.139 mV/kPa. The temperature coefficient of the proposed sensor is about 0.87 mV/°C over the range of 20 °C to 150 °C. Furthermore, due to the intensity mechanism, the sensor has a relatively simple demodulation system and can respond to high-frequency pressure in real time. The dynamic response of the sensor was verified in a 1 kHz sinusoidal pressure environment at room temperature.
Highlights
Pressure measurement in harsh environments is of great value in various fields, such as oil logging, aerospace vehicle engine testing, and in the pharmaceutical industry [1,2,3]
We proposed a microelectromechanical systems (MEMS)-based reflective intensity-modulated fiber-optic sensor for pressure measurement
The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS) integrated by MEMS technique
Summary
Pressure measurement in harsh environments is of great value in various fields, such as oil logging, aerospace vehicle engine testing, and in the pharmaceutical industry [1,2,3]. Intensity-modulated fiber-optic sensors have attracted significant interest due to their simple system, low cost, and high dynamic response. Shen et al proposed a fiber-optic displacement sensor, which is based on reflective intensity modulation using a fiber-optic collimator [15]. Vallan et al proposed and analyzed an intensity-modulated sensor for 2D crack monitoring [19]. Ge et al proposed an optical MEMS pressure sensor based on a mesa-diaphragm structure [29]. The MEMS-based optical fiber pressure sensors have attracted significant interest, as they are quite small and ideal for applications where restricted space or minimal measurement interference is a consideration. We proposed a MEMS-based reflective intensity-modulated fiber-optic sensor for pressure measurement. The pressure sensor proposed in this paper has the potential to be mass-produced, which can reduce manufacturing costs
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