Abstract
Rapid detection of the VOCs such as ethanol has obvious commercial value. Microelectromechanical systems (MEMS) devices based on sensitive nanomaterials are promising for this application. In this contribution, a MEMS sensor based on chitosan - tetrasulfonated copper phthalocyanine (Chit-TsCuPc) composite was employed for the detection of ethanol vapors. The device was fabricated based on PiezoMUMPs technology. Chit-TsCuPc was prepared and drop-casted on the interdigitated area of the sensor. A lab-based VOCs concentration control system was applied to provide an ethanol vapor atmosphere during the measurement. The stability of the sensor was demonstrated by a stable baseline in the air stream. The sensor demonstrated linear sensing property at range of 1500 – 3500 ppm ethanol vapor with sensitivity of – 0.11 Hz/ppm. This shows that the proposed Chit-TsCuPc based MEMS sensor has good sensitivity to ethanol vapor and promising potential for commercial applications.
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