MEMS-based Micro-scale Wind Turbines as Energy Harvesters of the Convective Airflows in Microelectronic Circuits

Abstract

As an alternative to conventional batteries and other energy scavenging techniques, this paper introduces the idea of using micro-turbines to extract energy from wind forces at the microscale level and to supply power to battery-less microsystems. Fundamental research efforts on the design, fabrication, and test of micro-turbines with blade lengths of just 160 µm are presented in this paper along with analytical models and preliminary experimental results. The proof-of-concept prototypes presented herein were fabricated using a standard polysilicon surface micro-machining silicon technology (PolyMUMPs) and could effectively transform the kinetic energy of the available wind into a torque that might drive an electric generator or directly power supply a micro-mechanical system. Since conventional batteries do not scale-down well to the microscale, wind micro-turbines have the potential for becoming a practical alternative power source for microsystems, as well as for extending the operating range of devices running on batteries.