Abstract
Growing demands for affordable, portable, and reliable optical microendoscopic imaging devices are attracting research institutes and industries to find new manufacturing methods. However, the integration of microscopic components into these subsystems is one of today’s challenges in manufacturing and packaging. Together with this kind of miniaturization more and more functional parts have to be accommodated in ever smaller spaces. Therefore, solving this challenge with the use of microelectromechanical systems (MEMS) fabrication technology has opened the promising opportunities in enabling a wide variety of novel optical microendoscopy to be miniaturized. MEMS fabrication technology enables abilities to apply batch fabrication methods with high-precision and to include a wide variety of optical functionalities to the optical components. As a result, MEMS technology has enabled greater accessibility to advance optical microendoscopy technology to provide high-resolution and high-performance imaging matching with traditional table-top microscopy. In this review the latest advancements of MEMS actuators for optical microendoscopy will be discussed in detail.
Highlights
Actuation and scanning mechanisms have played important roles in novel microendoscopic imaging systems
This review is intended to present some representative examples of many exciting optical microendoscopy being pursued around the world based on microelectromechanical systems (MEMS) actuators
Various optical imaging modalities implemented so far with MEMS actuation technologies will be given as a preview here, including optical coherence tomography (OCT), PA, confocal microscopy (CM), and multiphoton microscope
Summary
Actuation and scanning mechanisms have played important roles in novel microendoscopic imaging systems. A much greater control of the focal volume, including axial scanning for imaging into the tissue, can be achieved with the MEMS actuators positioned distally Their typical sizes mounted at the distal end of the instrument should be less than 5.5 mm (for example, fitting the Olympus therapeutic endoscope) in order to be compatible with the tool channel of a standard medical endoscope [1]. Micromirrors have been developed with microelectromechanical systems (MEMS) technologies that use either electrothermal or electrostatic actuators to achieve large deflection angles and high dynamic bandwidths with excellent linearity. These scanners can be batch fabricated on silicon wafers to achieve devices with relatively high yield. This review is intended to present some representative examples of many exciting optical microendoscopy being pursued around the world based on MEMS actuators
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