Abstract
An optical MEMS retroreflective phase modulator comprising a silicon MEMS microactuated platform to which a spherical retroreflector is attached has been investigated. The steady state and dynamic behaviour of the MEMS modulator have been experimentally measured when two different sizes of spherical retroreflectors are used. Dynamic testing shows a dominant resonant frequency response at around 200 Hz, which matches finite-element analysis for the structure.
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