MEMS accelerometers for mechanical vibrations analysis: a comprehensive review with applications

Abstract

In this paper, the use of MEMS accelerometers for measuring mechanical vibrations is presented. Also a wide review of the literature is performed by presenting the uses of the MEMS accelerometers in a great number of applications. These sensors are known for their low prices, low power consumption and low sizes, which enhance their use in applications such as energy harvesters, monitoring processes and for educational purposes. In order to propose these sensors for measuring vibrations, a complete evaluation of the MEMS accelerometers was performed by measuring amplitudes and frequencies of oscillations and comparing their dynamic characteristics with other accelerometers with higher precision. Moreover, two experiments were conducted: In the first one, the measurements of the amplitude given by a MEMS and a standard accelerometer while being excited with sinusoidal waves with different frequencies using a vibration exciter were taken and compared. For the second experiment, three MEMS sensors and a piezoelectric accelerometer were used to measure the accelerations of a 3-DOF shear-building excited by an unbalanced DC motor. The signals obtained were compared in the time and frequency domains; for the last case, the wavelet transform, the wavelet coherence and the power spectrum density were used.