Abstract
In this work, we designed and fabricated a multilayer thin film Pb(Zr,Ti)<TEX>$O_3$</TEX> cantilever with a Si proof mass for low frequency vibration energy harvesting applications. A mathematical model of a mu lti-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. W e fabricated a device with beam dimensions of about 4,930 <TEX>${\mu}M$</TEX> <TEX>${\times}$</TEX> 450 <TEX>${\mu}M$</TEX> <TEX>${\times}$</TEX> 12 <TEX>${\mu}M$</TEX>, and an integrated Si proof mass with dimensions of about 1,410 <TEX>${\mu}M$</TEX> <TEX>${\times}$</TEX> 450 <TEX>${\mu}M$</TEX> <TEX>${\times}$</TEX> 450 <TEX>${\mu}M$</TEX>. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 84.5 Hz, 88 mV, and 0.166 <TEX>${\mu}Wat$</TEX> 1.0 g and 23.7 <TEX>${\Omega}$</TEX>, respectively. The dimensions of the cantilever were determined for the resonance frequency of the cantilever.
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