Abstract
In this study, we fabricated a micro <TEX>$Pb(Zr,Ti)O_3$</TEX> (PZT) film piezoelectric cantilever with a Si proof mass and dual beams through MEMS process. The size of the beam and the integrated Si proof mass were about <TEX>$4,320{\mu}m{\times}290{\mu}m{\times}12{\mu}m$</TEX> and <TEX>$1,380{\mu}m{\times}880{\mu}m{\times}450{\mu}m$</TEX> each. To reduce the air damping and have the larger displacement of dual beams was used for design. After mounting micro PZT film piezoelectric cantilever on shaker, we measured the resonance frequency and a output voltage while making resonant frequency changed. The resonant frequency and the highest average power of the cantilever device were 110.2 Hz and 0.36 <TEX>${\mu}W$</TEX> each, at 0.8 g acceleration and 23.7 <TEX>$k{\Omega}$</TEX> load resistance, respectively.
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