Abstract
The present paper focuses on the theory of vibration of a circular micro-machined ultrasonic transducer to model a single cell of Capacitive Micromachined Ultrasonic Transducers (CMUTs) and it describes the displacement behavior of membrane with respect to applied static bias following Masons analysis of a suspended membrane under tension. Analysis of the critical parameters like collapse voltage and membrane deflection is made and compared with experimental results to verify the validity of the model.
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