Abstract

Trenching PZT material in a thicker PZT pyroelectric cell to improve the temperature variation rate was proposed in this study to enhance the efficiency of thermal energy-harvesting conversion by pyroelectricity. A thicker pyroelectric cell is beneficial in generating electricity pyroelectrically, but it opposes rapid temperature variations. Therefore, the PZT sheet was fabricated to produce deeper trenches to cause lateral temperature gradients induced by the trenched electrode, enhancing the temperature variation rate under homogeneous heat irradiation. When the trenched electrode type with an electrode width of 200 μm and a cutting depth of 150 μm was used to fabricate the PZT pyroelectric cell with a 200 μm thick PZT sheet, the temperature variation rate was improved by about 55%. Therefore, the trenched electrode design did indeed enhance the temperature variation rate and the efficiency of pyroelectric energy converters.

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