Abstract
A time of flight (TOF) Rutherford backscattering (RBS) system with a nano-probe line has been designed and installed. A medium energy (100–400 keV) nano-probe with beam pulsing and multiscaling detecting techniques was used to obtain enhanced detecting sensitivity for localized analysis. The multiscaling TOF detecting system has about 5 ns time resolution, corresponding to an energy resolution of 2–5 keV, and an advantage over the conventional RBS measurement system in energy resolution. Total charge exposed by TOF–RBS measurement is 4–5 orders of magnitude less than that by conventional RBS using a solid state detector (SSD).
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