Abstract
Reaction mechanisms of molecular layer deposition (MLD) of titanicone from TiCl4 and ethylene glycol (EG) were studied at 80 and 150 °C with in situ analytical methods using a Fourier-transform infrared (FTIR) spectrometer, a quartz crystal microbalance (QCM), and a quadrupole mass spectrometer (QMS). Our in situ analyses have revealed that EG molecules favor the so-called “double reaction” in which EG reacts twice with the TiClx surface species formed in the previous TiCl4 exposure step. The double reaction of EG is more favored at 150 °C than at 80 °C. The surface species TiOCH2CH2OTi formed by the double reaction can undergo a ring-opening reaction to regenerate a surface species TiOCH2CH2OH through readsorption of HCl. Furthermore, the surface species TiOCH2CH2OH with a hydroxyl tail can be converted to Ti–OH via acid-catalyzed intramolecular cyclization liberating ethylene oxide.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
