Abstract
Mechanisms of surface diffusion of single atoms, molecules and atomic clusters on flat terraces (with and without a driving force) of metal and semiconductor surfaces are discussed, focusing on our recent scanning tunneling microscopy (STM) results. Experimental evidence leading to these conclusions is presented. Besides the commonly known hopping mechanism, there are many other mechanisms. In Arrhenius analysis, a linear behavior can be expected for only some of the simpler mechanisms.
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