Abstract

The kinetics of the initial stages of ferroelectrics films growth under spatial nonuniform conditions is investigated. The complete closed system of equations relating the characteristics of growing island film with the process parameters is developed. The solution of that system allowed an assessment of all basic features of island film such as island size distribution function, mean radius of island and ratio of substrate occupation as the time and spatial coordinate dependence. The causes of the phenomenon why films produced by CVD-method show non-uniformity of characteristic over the substrate surface are revealed and mathematical description is given. Some recommendations on the development of films with prearranged properties are provided.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.