Year-end Sale % OFF 
Abstract
The hydrogen reaction on a hydrogenated silicon film is in two phases. This is manifested in slowing down of the hydrogen loss at the growing film. The slow down occurs in phases and both the processes have exponential character. The first phase consists of hydrogen incorporation into the layer and this occurs within the first 50 s. The second phase is of etching. This is confirmed by the similarity between the rate of hydrogen loss in the second phase and the rate of production of silyl species.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
