Mechanism of geometric nonlinearity in a nonprismatic and heterogeneous microbeam resonator

Abstract

Implementation of geometric nonlinearity in microelectromechanical systems (MEMS) resonators offers a flexible and efficient design to overcome the limitations of linear MEMS by utilizing beneficial nonlinear characteristics not attainable in a linear setting. Integration of nonlinear coupling elements into an otherwise purely linear microcantilever is one promising way to intentionally realize geometric nonlinearity. Here, we demonstrate that a nonlinear, heterogeneous microresonator system, consisting of a silicon microcantilever with a polymer attachment exhibits strong nonlinear hardening behavior not only in the first flexural mode but also in the higher modes (i.e., second and third flexural modes). In this design, we deliberately implement a drastic and reversed change in the axial vs bending stiffness between the Si and polymer components by varying the geometric and material properties. By doing so, the resonant oscillations induce the large axial stretching within the polymer component, which effectively introduces the geometric stiffness and damping nonlinearity. The efficacy of the design and the mechanism of geometric nonlinearity are corroborated through a comprehensive experimental, analytical, and numerical (finite element) analysis on the nonlinear dynamics of the proposed system.