Abstract
In this paper, an interesting inverted structure, fabricated by focusing femtosecond laser pulses through two different objective lenses (an oil-immersion objective lens and a dry objective lens), is reviewed. According to the interface spherical aberration theory, reasonable models are built and the simulated laser fluence in the focal region is given. The distribution of laser fluence agrees with the structural characteristics of the experimentally obtained void array. We propose that the monotonic tendency that the aberration function changes with the azimuth angle determines the final ‘growth’ direction of the void array.
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