Abstract
The temperature dependence of the contact resistivity ρc(T) of Au-Ti-Al-Ti-n+-GaN ohmic contacts is studied experimentally and substantiated theoretically in the temperature range T = 4.2–300 K. It is shown that the saturation portion of ρc(T) is observed in the low-temperature measurement region (4.2–50 K). As the temperature increases, ρc decreases by the exponential law. The experimental and calculated dependences ρc(T) are in agreement. The obtained results make it possible to conclude the field nature of the current transfer for the saturation region of ρc(T) and the thermal-field one, for the exponential region.
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