Abstract
Hot-film air flow sensors are now widely applied in many industrial fields. Their accuracy can be seriously affected when there are contaminants accumulated on the sensor chip. To predict the decrease of accuracy caused by contamination, the accumulation mechanism of contaminant particles on the surface of the sensor chip is studied in this paper. The adsorption process of particle is analyzed and a theoretical model of the cumulative thickness of the particles over time is established. A test platform for the particle accumulation is built and a long-term cumulative test is conducted. According to the tests, cumulative thickness of the particles increases while the growth rate slows over time. The results of the test fit those of the theoretical model. Various factors affecting the accumulation of contaminants are analyzed. The results indicate that the cumulative thickness of the particles increases along with the increase of the particle concentration, the particle charge, and the electric field strength on the chip surface but decreases along with the increase of the particle radius. The test results also show that the electrical force is the dominant reason of particle adsorption accumulation. By decreasing the electric field strength on the sensor surface, the cumulative thickness of the particles can be effectively reduced.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
