Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators.

Han Du,Guangya Zhou,Fook Chau

doi:10.3390/mi7040069

Han Du, Guangya Zhou + Show 1 more

Open Access

https://doi.org/10.3390/mi7040069

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Journal: Micromachines	Publication Date: Apr 16, 2016
Citations: 38	License type: CC BY 4.0

Affiliation: National University of Singapore

Abstract

This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed.

Highlights

Semiconductor technology has grown rapidly in recent decades and nowadays, semiconductor devices are widely integrated with many modern equipment, from radios to satellites
Photonic signal processing has already been proven to possess ultra-high operation speed and low cross-talk between channels [2,3], issues such as power consumption, cost and yield have hampered a wider industrialization of photonic technology [4]
The relatively mature electro-optic methods currently dominate the field of tunable photonics while the nascent but promising mechanical methods are believed to be able to further accelerate the development of photonic technologies [15]

Summary

Introduction

Semiconductor technology has grown rapidly in recent decades and nowadays, semiconductor devices are widely integrated with many modern equipment, from radios to satellites. Electro-optic methods—as well as thermo-optical methods—do not have the capability to drastically reconfigure photonic structures or significantly vary the strength of coupling between them. Despite this drawback, the relatively mature electro-optic methods currently dominate the field of tunable photonics while the nascent but promising mechanical methods are believed to be able to further accelerate the development of photonic technologies [15]. One widely-used group of mechanical tuning methods is based on micro/nano-electro-mechanical systems (MEMS/NEMS). Since it is relatively easy to integrate MEMS/NEMS actuators on-chip with functional components and combine their fabrication processes, it is reasonable to employ the technology to develop tunable photonic devices

Micro and Nano Fabrication

Waveguide

Figure

Photonic

Chip-Scale

15. Schematic

Conclusions