Abstract
Improvements in the ruling, replication, and measurement of mechanically ruled diffraction gratings, are described, especially for synchrotron radiation applications. Profiles of extremely fine and shallow grooves are measured with a scanning electron microscope. Replica gratings can now be baked for high vacuum applications using a high-temperature durable epoxy as cement. The groove space variation technology is effective for reducing aberrations in concave grating monochromators. A grazing incidence monochromator without using collimating and focusing mirrors has been designed and fabricated for a soft X-ray beamline at the Photon Factory by utilizing the advantage of a varied-space plane grating with self-focusing properties.
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