Mechanical testing of micro samples produced by a novel LIGA related process chain

Abstract

In this paper, a new LIGA related process chain, named MSG process [German acronym for multicomponent injection molding (MS) and electroplating (G)] is presented as a promising production cycle for the replication of micro-testing samples. Structures manufactured by the LIGA process but also e.g. micro-milled structures can be reproduced. The focus of this work was two fold: First, the accuracy of different replicated structures was investigated, and second, the influence of the surface quality on mechanical performance of electrodeposited nanocrystalline materials was tested. Therefore, micro samples were manufactured by the use of different methods resulting in a variation of the measured surface quality. The surface of LIGA and micro-milled samples can be accurately replicated using this process. Furthermore, it can be shown which dimensional variations within the process occur and how this is influenced by the surface of the original structure. Finally, preliminary mechanical tests are presented which show the successful application of the MSG process.