Abstract
Micro-electromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance, but poor mechanical properties. To improve their reliability, auxiliary pillars have been used. However, few studies have been carried out on the response of a suspended inductor with auxiliary pillars under high mechanical shock. In this paper, a theoretical method is proposed that combines a single-degree-of-freedom (SDOF) model and a method for solving statically indeterminate structures. The calculated results obtained by this proposed method were verified by finite-element analysis (ANSYS). The calculated results obtained by the proposed method were found to agree well with the results of ANSYS simulation. Finally, this method was extended to a suspended inductor with double auxiliary pillars. The method proposed in this paper provides a theoretical reference for mechanical performance evaluation and reliability optimization design for MEMS suspended inductors with auxiliary pillars.
Highlights
IntroductionMicro-electromechanical system (MEMS) suspended inductors show excellent radio-frequency (RF) performance because they lift the inductor coil several micrometers above the substrate [1,2,3]
Micro-electromechanical system (MEMS) suspended inductors show excellent radio-frequency (RF) performance because they lift the inductor coil several micrometers above the substrate [1,2,3].MEMS suspended inductors have poor mechanical properties
The resonator is the Generally, substrate is considered as to a rigid body under mechanical shock, and the inductor coil can be modeled as a resonator attached to an accelerating support
Summary
Micro-electromechanical system (MEMS) suspended inductors show excellent radio-frequency (RF) performance because they lift the inductor coil several micrometers above the substrate [1,2,3]. Li et al [14] studied the Micromachines 2018, 9, 176; doi:10.3390/mi9040176 www.mdpi.com/journal/micromachines accelerometers during drop tests They used an SDOF model and a continuous beam model to take the flexibility of the microstructures into account and to calculate their maximum deflection. MEMS suspended inductors auxiliary the flexibility ofbeen the microstructures into account and to calculate their maximum deflection They used an SDOF model and a with continuous pillarsSundaram under mechanical shock. Model to solve for the ofinductor the moving inductor with auxiliary pillar under high-g deformation anddisplacement stress of the can be investigations have been carried out on the response of suspended inductors with auxiliary structures under mechanical shock and obtained the critical acceleration for failure. The ANSYS finite-element response of the suspended inductor stresses with auxiliary pillar underThen mechanical shock is analyzed, and(FE)
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