Mechanical Properties Testing of Diamond and Diamond-Like Films by Ultra-Low Load Indentation

Michael E O’Hern,Carl J Mchargue

doi:10.1007/978-1-4684-5967-8_47

Mechanical Properties Testing of Diamond and Diamond-Like Films by Ultra-Low Load Indentation

Michael E O’Hern, Carl J Mchargue

https://doi.org/10.1007/978-1-4684-5967-8_47

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Publication Date: Jan 1, 1991

Citations: 3

#Diamond-Like Films #Diamond Films + Show 8 more

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Abstract

Potential applications of diamond-Like and diamond films are currently driving a concerted effort in the research and development community to further develop the deposition techniques by which the films are grown. Deposition parameters such as temperature, pressure, feed stock composition and flow rate can reasonably be expected to alter the properties of the resultant films.

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