Abstract
(Ti,Cr)N coatings were deposited by inductively coupled plasma (ICP) assisted magnetron sputtering and the properties of the coatings were investigated. The (Ti,Cr)N coatings deposited by ICP assisted sputtering showed a much higher micro-hardness (>5000 HK 0.01) compared to coatings produced by the conventional DC magnetron sputtering method. The ICP deposited (Ti,Cr)N coatings also showed superior properties in adhesion and wear compared to the DC sputtered (Ti,Cr)N coatings. The superior mechanical properties of ICP deposited (Ti,Cr)N coatings were attributed to the fine and dense micro-structure and high compressive residual stress.
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