Abstract
Twelve La 2O 3 doped diamond-like carbon (DLC) nanofilms were deposited using unbalanced dual-magnetron sputtering. AFM, XRD, Raman spectroscopy, AES, XPS, TEM, contact surface profiler and nanoindenter were employed to investigate the structure and tribological properties of deposited films. The results show that the La 2O 3 doped DLC films are amorphous. La 2O 3 doping obviously decreases internal stress, and effectively increases the elastic modulus. This results from the dissolving and dissolution of La 2O 3 within the amorphous DLC matrix. Furthermore, the friction coefficient of the doped DLC films decreases, and adhesion strength increases. These are attributed to the lubrication function of La 2O 3 and the formation of transition layer at interface, respectively.
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