Abstract
Nanocrystalline diamond coatings were deposited by MPCVD on the spheres used for a ball bearing. The nanocrystalline coatings with a grain size of 50 nm were confirmed by the surface morphology and composition analysis. The hardness of the coating is 20–40 GPa tested by nanoindentation, which is higher than that of tungsten carbide and silicon nitride substrates. The coating around the sphere observed from the Micro CT images is uniform with a thickness of 12 μm.
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