Mechanical properties and epitaxial growth of TiN/AlN superlattices

Abstract

TiN/AlN superlattice coatings combine the superlattice effect and the outstanding properties of AlN in its non-equilibrium face-centred cubic (NaCl-type, rs) structure. In comparison with their non-layered counterparts, the superlattice films exhibit superior and strongly bilayer-period-dependent mechanical properties. Here we analyse the structure and mechanical properties of superlattices with AlN layer thicknesses of 0.9, 1.2, and 1.5 nm and different TiN layer thicknesses. We found that the maximum AlN layer thickness, up to which AlN can be fully stabilized in its metastable rs structure, depends on the substrate material and is at least 1.5 nm for coatings on MgO (100) and 0.9 nm for the coatings grown on Si (100) or Al2O311¯02. Our data also show that with increasing thickness of the template layer, the crystallization of AlN in the stable wurtzite structure is favoured. TiN/AlN superlattice coatings on MgO (100) exhibit the highest hardness values, peaking at 37.0 ± 0.5 GPa for AlN layer thicknesses of 0.9 nm and a bilayer period of 2.5 nm. Films with ultra-small bilayer periods exhibit high hardness combined with low values of elastic modulus suggesting a high elastic-strain-to-failure for these coatings. The highest toughness was found for superlattice films grown on MgO (100), scaling inversely with the bilayer period.