Abstract
Diamond-like carbon (DLC) films with different pulse widths were prepared on Si and NiTi alloys by plasma immersion ion processing (PIIP). The mechanical properties and corrosion behavior of the DLC films are investigated. The results show that the qualitative sp 3 / sp 2 ratio obtained from Raman spectra and the nano-hardness is decreased with the increase of the pulse width, and the DLC films obviously increase the surface hardness of NiTi alloy and decrease its friction coefficient and markedly improve its corrosion resistance.
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